The RXi is the latest generation of Tec-Sem's reticle management solutions. It's based on basic platform to perform high throughput particle detection and a postpone particle blow off by an integrated air knife.

The RXi is a scalable solution based on a the basic system RXi-B to extended RXi-E and finally with integrated reticle storage RXi-S featuring the field proven Tec-Cell technology to protect the reticle.

The RXi is a system that allows everything from reticle inspection, and qualification up to storage and management. The system is an open configurable solution in order to meet all possible reticle handling requirements a manufacturing fab or a mask house/shop