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The RS 1100 Reticle Stocker is an automated stand-alone management system that stores 5” or 6” reticles in an ISO class 3 environment. With its compact size, the RS 1100 does easily fit in existing production lines.

The RS 1100 supports a variety of different reticle cassettes including SMIF multi-pods (MRSP), SMIF mono-pods (RSP) as well as Nikon and Canon reticle cassettes.


RS 1100


Key Features and Advantages

  • Ensures reticle management and traceability.
  • Eliminates defects caused by operator handling.
  • Reduces number of reticle carriers.
  • Particle Detection System reduces lithography rework.
  • High storage density methodology.